Services of ENCC

- Low volume fabrication
- Prototyping
- Process development
- Substrate preparation
- Specialty service
- Electronic and Photonic materials development
- Lithography and etching
- E-beam lithography and etching
- Multi-User MEMS process
- MOS process modules

Orientations of the centre

List of Equipment

Thin Film Deposition system with chambers for sputtering coating, plasma and ion etching, and electron beam.
Thermal Processing system for high purity oxidation, heat treatment, and annealing metals with several ovens.
Photolithographic patterning device.
Chemical etching devices for dry and wet etching.
Inspection and Characterization: SEM, AFM, Spectrometer, Ellipsometer
Bonding and Packaging: dicing saw, die and wire bonder.
Test and Measurement: Test system, modular monitor, simulator, probe station, impedance analyzer, and some software.

Nanotools

Probe materials and technologies

- Silicon nitride
- Silicon etching, sharpening by oxidation
- FIB sharpening
- EBD, CNT growing
- Attaching micro spheres, particles, single molecules, CNT
- NSOM, STM tips
- Coating (biological, chemical, conductive, magnetic, hard)

Calibration

- Sharpness characterization
- Force constants (normal and lateral)
- Conductivity (electric measurements)
- Coercitivity (magnetic measurements)
- Optical properties (NSOM)

Nanotools - interaction of partners within the orientation

Nanometrology – state of the art

Dimensional standards
- MEMS-based XY and height standards
- Atomic steps
Probe characterizers
- MEMS-based characterizers
- Porous materials
- DNA or other well-defined molecules & particles
- Atomic lattices
- Ti films

Nanometrology - interaction of partners within the orientation

Applied nanotechnology: case projectsnanosensors nanosensors

Electronics and IT
Quantum computers
Nanoelectronics
Data storage
Optical switches

Materials
Nanoparticle composites
Carbon nanotubes
Self-assembling coatings
Smart fabrics

Devices
NEMS
Tunable lasers
Liquid crystals
Reaction beds
Microfluidics
Light sources

Power & processes
Catalysts
Fuel cells
Solar cells

Life science
Nanomembranes
Tagging molecules
Drug delivery
Single molecule detection
Genetic engineering

Nanosensors - interaction of partners within the orientation

Summary

Nanotechnology center is formed of specialists from both instrumentation R&D and applied nanotechnology.

Orientations include nanotools (SPM probes), nanometrology (calibration gauges, test structures, equipment) and nanosensors as case projects from applied nanotechnology.

The future activities of the Centre will not be limited to above-mentioned directions and other applied nanotechnologies can be considered.

If you have any proposal, comments or questions, please contact info@encc.ee